Тонкопленочные композиционные материалы, содержащие наночастицы полупроводников и металлов

Abstract

The sol-gel method of SiO2:CuO target formation is developed. The results of investigation of features of obtaining targets on the basis of aerosil A-380 copper salts are presented. The data on the structure and morphology of high-silica films obtained by ion-beam sputtering in vacuum of targets on the polished surface of silicon substrate are presented. The fields of application of the obtained thin films are determined.